Mechanisms of the Phase Separation of Nonstoichiometric Si Oxide Films: What Can One Learn From Thermodynamics?
Mechanisms of phase separation in non-stoichiometric solutions of silicon oxide high-temperature annealing. Creating a matrix of silicon oxide and silicon nano-sized inclusions. Analysis of thermodynamic processes during the separation Si/Si oxide phase.
| Рубрика | Физика и энергетика |
| Вид | статья |
| Язык | английский |
| Дата добавления | 30.07.2016 |
| Размер файла | 395,6 K |
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